Table 1. Electrical characteristics of the devices with different channel lengths

Channel length (μm) Von (V) Vth (V) Imax/Imin Subthreshold swing (V/dec) Field effect mobility (cm2/Vs)*
100 −76 −28.9 4.8×106 5.07 48.2
150 −64 −24.1 6.4×106 1.65 50.7
200 −40 −13.3 2.0×106 1.60 46.1
250 −42 −11.5 1.6×106 1.56 53.8
Please note that the field effect mobility values are calculated by utilizing effective channel length Leff in Eq. 2.